Invention Application
- Patent Title: GAS SENSOR WITH INTEGRATED OPTICS AND REFERENCE CELL
- Patent Title (中): 具有集成光学和参考电池的气体传感器
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Application No.: US14799894Application Date: 2015-07-15
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Publication No.: US20170016817A1Publication Date: 2017-01-19
- Inventor: Tymon Barwicz , William M. Green , Yves C. Martin , Jason S. Orcutt , Lionel Tombez
- Applicant: International Business Machines Corporation
- Main IPC: G01N21/39
- IPC: G01N21/39 ; G01N21/3504

Abstract:
A method of fabricating a gas sensor on a substrate and a gas sensor fabricated on a substrate that includes optical and electronic components are described. The method includes fabricating a laser to output light over a range of wavelengths within a waveguide, fabricating a splitter to split the light output by the laser to a reference waveguide and to a detection waveguide, fabricating a reference cell to house the reference waveguide and a reference gas. An output of the reference waveguide is coupled to a first optical detector and an output of the detection waveguide is coupled to a second optical detector to identify or quantify an ambient gas.
Public/Granted literature
- US09625379B2 Gas sensor with integrated optics and reference cell Public/Granted day:2017-04-18
Information query
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