Invention Application
US20170059322A1 MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE 审中-公开
具有加速噪声抑制的微电子结构

  • Patent Title: MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE
  • Patent Title (中): 具有加速噪声抑制的微电子结构
  • Application No.: US15140349
    Application Date: 2016-04-27
  • Publication No.: US20170059322A1
    Publication Date: 2017-03-02
  • Inventor: Luca CoronatoGabriele Cazzaniga
  • Applicant: STMicroelectronics S.r.l.
  • Priority: ITTO2009A000371 20090511
  • Main IPC: G01C19/5747
  • IPC: G01C19/5747
MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE
Abstract:
An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.
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