Invention Application
US20170059433A1 SUPERSENSITIVE LINEAR PRESSURE TRANSDUCER 审中-公开
超导线性压力传感器

SUPERSENSITIVE LINEAR PRESSURE TRANSDUCER
Abstract:
Apparatus and methods for a MEMS-fabricated variable capacitor. In one embodiment the capacitor is a comb drive comprising a plurality of plates interdigitated with a corresponding blades. As the plates move relative to the blades, the capacitance of the sensor changes. The capacitor is sufficiently sensitive to measure respiratory pressure in an animal.
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