In the inspection lighting device, between a surface light source for emitting an inspection light and the inspection object, at least one shielding mask is disposed, and a lens is disposed on a side closer to the inspection object than the shielding mask such that the shielding mask is positioned across the focus position of this lens as a center. In an irradiation solid angle of the inspection light for the inspection object formed when the light emitted from the surface light source is irradiated on to the inspection object by the lens the shielding mask forms a dark area. So that, in accordance with a change in reflection, transmission, scattering occurring at a feature point on the inspection object, a shape, a size, a tilt of the irradiation solid angle of the inspection light can be changed.