Invention Application
- Patent Title: INTEGRATED PIEZOELECTRIC MICROMECHANICAL ULTRASONIC TRANSDUCER PIXEL AND ARRAY
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Application No.: US15292057Application Date: 2016-10-12
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Publication No.: US20170110504A1Publication Date: 2017-04-20
- Inventor: Hrishikesh Vijaykumar Panchawagh , Suryaprakash Ganti , Kostadin Dimitrov Djordjev , David William Burns , Timothy Alan Dickinson , Donald William Kidwell, JR. , Ravindra Vaman Shenoy , Jon Bradley Lasiter , Hao-Yen Tang , Yipeng Lu
- Applicant: QUALCOMM Incorporated
- Main IPC: H01L27/20
- IPC: H01L27/20 ; H01L27/12 ; G06F3/043 ; G01S7/52 ; G06K9/00 ; H01L41/113 ; H01L41/311

Abstract:
An ultrasonic sensor pixel includes a substrate, a piezoelectric micromechanical ultrasonic transducer (PMUT) and a sensor pixel circuit. The PMUT includes a piezoelectric layer stack including a piezoelectric layer disposed over a cavity, the cavity being disposed between the piezoelectric layer stack and the substrate, a reference electrode disposed between the piezoelectric layer and the cavity, and one or both of a receive electrode and a transmit electrode disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The sensor pixel circuit is electrically coupled with one or more of the reference electrode, the receive electrode and the transmit electrode and the PMUT and the sensor pixel circuit are integrated with the sensor pixel circuit on the substrate.
Information query
IPC分类: