MEMS PEIZOELECTRIC ACCELEROMETER WITH BUILT-IN SELF TEST
Abstract:
Apparatus and associated methods relate to an accelerometer having first and second piezoelectric transducers that are electrically isolated but mechanically coupled one to another via a coupling member. The first piezoelectric transducer is configured to induce a mechanical deformation of the coupling member in response to an electrical excitation signal received by the first piezoelectric transducer. The second piezoelectric transducer is configured to generate an electrical response signal in response to mechanical deformation of the coupling member. The accelerometer has a self-test module configured to generate the electrical excitation signal and to receive the electrical response signal. The self-test module is further configured to generate a sensor test result based upon a comparison between the received electrical response signal and a reference signal. The self-test module may advantageously detect changes in an excitation/response relation due to time and/or environmental conditions, for example.
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