Invention Application
- Patent Title: CHARGED PARTICLE BEAM APPARATUS AND VIBRATION DAMPER FOR CHARGED PARTICLE BEAM APPARATUS
-
Application No.: US15440327Application Date: 2017-02-23
-
Publication No.: US20170250054A1Publication Date: 2017-08-31
- Inventor: Motohiro TAKAHASHI , Yoshimasa FUKUSHIMA , Katsunori ONUKI , Tetsuya NIIBORI
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Priority: JP2016-035027 20160226
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26
Abstract:
There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.
Public/Granted literature
- US10056226B2 Charged particle beam apparatus and vibration damper for charged particle beam apparatus Public/Granted day:2018-08-21
Information query
