Invention Application
- Patent Title: METHOD OF FABRICATION OF Al/GE BONDING IN A WAFER PACKAGING ENVIRONMENT AND A PRODUCT PRODUCED THEREFROM
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Application No.: US15688788Application Date: 2017-08-28
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Publication No.: US20170355597A1Publication Date: 2017-12-14
- Inventor: Steven S. NASIRI , Anthony F. Flannery, JR.
- Applicant: INVENSENSE, INC.
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00 ; H01L21/18 ; B81C3/00 ; B81B7/00 ; B23K20/02

Abstract:
A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.
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