Invention Application
- Patent Title: OPTICAL ELEMENT
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Application No.: US15524919Application Date: 2015-11-13
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Publication No.: US20170357075A1Publication Date: 2017-12-14
- Inventor: Ryohei UCHINO
- Applicant: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Applicant Address: JP Hyogo
- Assignee: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Current Assignee: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Current Assignee Address: JP Hyogo
- Priority: JP2014-235189 20141120
- International Application: PCT/JP2015/082020 WO 20151113
- Main IPC: G02B7/00
- IPC: G02B7/00 ; B81B3/00 ; G03F7/20 ; G02B7/02 ; G02B26/08

Abstract:
An optical filter device (1000) includes: a first mirror (101) transmitting portion of incident light; a second mirror (201) spaced apart from the first mirror (101), and transmitting portion of the incident light; actuators (300) driving the first mirror (101) to change a space between the first mirror (101) and the second mirror (201); and a detection electrode (400) detecting displacement of the first mirror (101). The detection electrode (400) includes: a movable comb electrode (410) including movable combs (414) and connected to the first mirror (101); and a stationary comb electrode (420) including stationary combs (424) facing the movable combs (414) in parallel with each other. The movable combs (414) are displaced in parallel with the stationary combs (424) when the movable comb electrode (410) is displaced together with the first mirror (101).
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |