Invention Application
- Patent Title: Measurement Apparatus and Method
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Application No.: US15562729Application Date: 2016-03-10
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Publication No.: US20180081279A1Publication Date: 2018-03-22
- Inventor: Willem Jakobus Cornelis KOPPERT
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP15166773.0 20150507
- International Application: PCT/EP2016/055067 WO 20160310
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01S3/09 ; H01S3/00 ; G01R1/07

Abstract:
A measurement apparatus for measuring at least one property of an electron bunch or other group of charged particles travelling through a cavity (310), comprises a plurality of electrodes (302-308) arranged around the cavity, a plurality of optical sensors (322-328), wherein the plurality of electrodes are configured to provide signals to the optical sensors thereby to modulate at least one optical property of the optical sensors. The apparatus further comprises at least one laser source (330) for providing a laser beam comprising a series of laser pulses to the plurality of optical sensors to obtain measurements representative of said at least one optical property of the optical sensors, and a processing resource (320) configured to process at least a first measurement signal from a first one of the optical sensors and a second measurement signal from a second one of the optical sensors, thereby to determine at least one property of the electron bunch or other group of charged particles, wherein the at least one property comprises charge and/or lateral position.
Public/Granted literature
- US10185230B2 Measurement apparatus and method Public/Granted day:2019-01-22
Information query
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