Invention Application
- Patent Title: WAVELENGTH-BASED OPTICAL FILTERING
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Application No.: US15270072Application Date: 2016-09-20
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Publication No.: US20180081280A1Publication Date: 2018-03-22
- Inventor: Alexander Anthony Schafgans , Igor Vladimirovich Fomenkov , Yezheng Tao , Rostislav Rokitski , Robert Jay Rafac , Daniel John William Brown , Cory Alan Stinson
- Applicant: ASML Netherlands B.V.
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01S3/00 ; G02B27/42 ; G02B5/20 ; H01S3/23 ; G02B27/14

Abstract:
An optical source for an extreme ultraviolet (EUV) photolithography tool includes a light-generation system including a light-generation module; an optical amplifier including a gain medium associated with a gain band, the gain medium configured to amplify light having a wavelength in the gain band; and a wavelength-based optical filter system on a beam path between the light-generation module and the optical amplifier, the wavelength-based optical filter system including at least one optical element configured to allow light having a wavelength in a first set of wavelengths to propagate on the beam path and to remove light having a wavelength in a second set of wavelengths from the beam path, the first set of wavelengths and the second set of wavelengths including different wavelengths in the gain band of the optical amplifier.
Public/Granted literature
- US10663866B2 Wavelength-based optical filtering Public/Granted day:2020-05-26
Information query
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