Invention Application
- Patent Title: RANKING DEFECTS WITH YIELD IMPACTS
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Application No.: US15440791Application Date: 2017-02-23
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Publication No.: US20180238958A1Publication Date: 2018-08-23
- Inventor: Zhigang Song , Qian Xu , William Davies, JR.
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY GRAND CAYMAN
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY GRAND CAYMAN
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G06F17/16 ; G06F7/556

Abstract:
Failure types that caused defective items to fail testing are identified, the defective items are grouped by the failure types to produce failure-type groups, and the defective items are analyzed to identify defect types that caused the failures. Failure-type limited yield within each of the failure-type groups, and failure-type group-specific defect ratio based on proportions of the defect types within each of the failure-type groups are determined. Additionally, each failure-type group-specific defect ratio is weighted using the failure-type limited yield to produce a weighted failure-type group-specific defect limited yield. For each of the defect types, the weighted failure-type group-specific defect limited yield from each of the failure-type groups is combined to produce the failure-type influenced defect-type total limited yield. Matrix processing is used for the weighting and combination processes. The defect types are ranked based on the failure-type influenced defect-type total limited yield.
Public/Granted literature
- US10191107B2 Ranking defects with yield impacts Public/Granted day:2019-01-29
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