Invention Application
- Patent Title: OPTICAL MEASUREMENT APPARATUS, AND OPTICAL MEASUREMENT METHOD
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Application No.: US16015349Application Date: 2018-06-22
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Publication No.: US20190011351A1Publication Date: 2019-01-10
- Inventor: Yusuke IZUTANI , Ikuo WAKAYAMA
- Applicant: OTSUKA ELECTRONICS CO., LTD.
- Priority: JP2017-132206 20170705
- Main IPC: G01N15/14
- IPC: G01N15/14 ; G01B11/08

Abstract:
An optical measurement apparatus includes a main body base, an optical base movably combined with the main body base, a measurement optical system fixed to the optical base, and an optical base moving mechanism which moves the optical base relative to the main body base. The optical base moving mechanism moves the optical base relative to the main body base between an internal measurement position and an external measurement position. A measurement object position of the measurement optical system coincides with an internal measurement object position within the main body base. The measurement object position of the measurement optical system coincides with an external measurement object position outside the main body base.
Public/Granted literature
- US10788412B2 Optical measurement apparatus, and optical measurement method Public/Granted day:2020-09-29
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