Invention Application
- Patent Title: METHODS OF FORMING SUBLITHOGRAPHIC FEATURES OF A SEMICONDUCTOR DEVICE
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Application No.: US16208122Application Date: 2018-12-03
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Publication No.: US20200176255A1Publication Date: 2020-06-04
- Inventor: Akash Nigam , Rajesh N. Gupta
- Applicant: Micron Technology, Inc.
- Main IPC: H01L21/033
- IPC: H01L21/033 ; H01L21/768

Abstract:
A method of forming sublithographic features. The method comprises forming a pattern of lines at a first pitch, the lines comprising horizontal portions and sloped portions. A spacer material is formed adjacent to the lines and portions of the spacer material are removed to form spacers on the lines, the spacers comprising a second pitch. The lines are removed. A sloped profile of the lines prevents the formation of loops of the spacer material, enabling the formation of sublithographic features without using a chop mask or chop mask process acts. Additional methods are disclosed.
Information query
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