• Patent Title: PAD-TEMPERATURE REGULATING APPARATUS, METHOD OF REGULATING PAD-TEMPERATURE, POLISHING APPARATUS, AND POLISHING SYSTEM
  • Application No.: US17417294
    Application Date: 2019-12-19
  • Publication No.: US20220072679A1
    Publication Date: 2022-03-10
  • Inventor: Toru MARUYAMA
  • Applicant: EBARA CORPORATION
  • Applicant Address: JP Tokyo
  • Assignee: EBARA CORPORATION
  • Current Assignee: EBARA CORPORATION
  • Current Assignee Address: JP Tokyo
  • Priority: JP2018-247771 20181228,JP2019-228041 20191218
  • International Application: PCT/JP2019/049832 WO 20191219
  • Main IPC: B24B37/015
  • IPC: B24B37/015 B24B37/20 B24B49/14
PAD-TEMPERATURE REGULATING APPARATUS, METHOD OF REGULATING PAD-TEMPERATURE, POLISHING APPARATUS, AND POLISHING SYSTEM
Abstract:
The present application relates to a pad-temperature regulating apparatus for regulating a temperature of a surface of a polishing pad. The pad-temperature regulating apparatus includes a pad-contact member, a supply system for supplying a heating liquid and a cooling liquid into the pad contact member, a pad-temperature measuring device for measuring the temperature of the surface of the polishing pad, and a controller for performing a PID control of manipulated variables of a first flow control valve and a second flow control valve. The controller includes a memory in which a learned model constructed to maintain a temperature behavior curve, created based on measured values of the pad-temperature measuring device, within a predetermined allowable range, is stored; and a processing device which inputs at least one temperature behavior parameter to the learned model, and performs a calculation to output a change value of PID parameter for the PID control.
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