Invention Application
- Patent Title: PAD-TEMPERATURE REGULATING APPARATUS, METHOD OF REGULATING PAD-TEMPERATURE, POLISHING APPARATUS, AND POLISHING SYSTEM
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Application No.: US17417294Application Date: 2019-12-19
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Publication No.: US20220072679A1Publication Date: 2022-03-10
- Inventor: Toru MARUYAMA
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2018-247771 20181228,JP2019-228041 20191218
- International Application: PCT/JP2019/049832 WO 20191219
- Main IPC: B24B37/015
- IPC: B24B37/015 ; B24B37/20 ; B24B49/14

Abstract:
The present application relates to a pad-temperature regulating apparatus for regulating a temperature of a surface of a polishing pad. The pad-temperature regulating apparatus includes a pad-contact member, a supply system for supplying a heating liquid and a cooling liquid into the pad contact member, a pad-temperature measuring device for measuring the temperature of the surface of the polishing pad, and a controller for performing a PID control of manipulated variables of a first flow control valve and a second flow control valve. The controller includes a memory in which a learned model constructed to maintain a temperature behavior curve, created based on measured values of the pad-temperature measuring device, within a predetermined allowable range, is stored; and a processing device which inputs at least one temperature behavior parameter to the learned model, and performs a calculation to output a change value of PID parameter for the PID control.
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