Invention Application
- Patent Title: MICRO-ELECTROMECHANICAL DEVICE FOR USE IN A FLOW CONTROL APPARATUS
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Application No.: US17475296Application Date: 2021-09-14
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Publication No.: US20220081282A1Publication Date: 2022-03-17
- Inventor: Nir Merry , Ming Xu
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
Disclosed herein are embodiments of a sensor device, systems incorporating the same, and methods of fabricating the same. In one embodiment, a sensor device comprises a free-standing sensing element, such as a micro-electromechanical system (MEMS) device. The sensor device further comprises a metallic band to facilitate mounting the MEMS device to a mounting plate. The sensor device further comprises a conformal coating on a least a portion of a sensor region of the sensor device.
Public/Granted literature
- US12235144B2 Micro-electromechanical device for use in a flow control apparatus Public/Granted day:2025-02-25
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