Invention Application
- Patent Title: WAFER STRUCTURE
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Application No.: US17116644Application Date: 2020-12-09
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Publication No.: US20220134750A1Publication Date: 2022-05-05
- Inventor: Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Chi-Feng Huang , Yung-Lung Han , Tsung-I Lin
- Applicant: Microjet Technology Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Microjet Technology Co., Ltd.
- Current Assignee: Microjet Technology Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Priority: TW109138198 20201103
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/21

Abstract:
A wafer structure is disclosed and includes a chip substrate and at least one inkjet chip. The chip substrate is a silicon substrate fabricated by a semiconductor process. The inkjet chip is directly formed on the chip substrate by the semiconductor process, whereby the wafer structure is diced, and the inkjet chip is produced, to be implemented for inkjet printing. The inkjet chip includes a plurality of ink-drop generators produced by the semiconductor process and formed on the chip substrate. Each of the ink-drop generators includes a barrier layer, an ink-supply chamber and a nozzle, and the ink-supply chamber and the nozzle are integrally formed in the barrier layer.
Public/Granted literature
- US11724494B2 Wafer structure Public/Granted day:2023-08-15
Information query
IPC分类: