Invention Application
- Patent Title: FIELD-EFFECT TRANSISTOR, FIELD-EFFECT TRANSISTOR ARRAY STRUCTURE AND METHOD OF MANUFACTURING FIELD-EFFECT TRANSISTOR
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Application No.: US17399175Application Date: 2021-08-11
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Publication No.: US20220149166A1Publication Date: 2022-05-12
- Inventor: Kwanghee LEE , Sangwook KIM
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0150512 20201111
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L29/24 ; H01L27/088 ; H01L29/06

Abstract:
A field-effect transistor includes a gate structure comprising a structure in which a first insulating layer, a first gate electrode, and a second insulating layer are sequentially stacked on a first conductive layer, the gate structure surrounding a first hole through the first insulating layer and exposing a part of the first conductive layer; a second conductive layer on the second insulating layer and surrounding a second hole connected to the first hole and exposing a part of the first conductive layer; a first gate insulating layer covering an inner wall of the gate structure exposed by the first hole; a semiconductor layer covering a part of the first conductive layer exposed through the first hole and the second hole, the first gate insulating layer, and the second conductive layer; a second gate insulating layer covering the semiconductor layer; and a second gate electrode filling the first and second holes.
Public/Granted literature
Information query
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