Invention Application
- Patent Title: ANGLE INDEPENDENT OPTICAL SURFACE INSPECTOR
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Application No.: US17685679Application Date: 2022-03-03
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Publication No.: US20220187218A1Publication Date: 2022-06-16
- Inventor: Steven W. Meeks , Hung Phi Nguyen , Alireza Shahdoost Moghaddam
- Applicant: Steven W. Meeks , Hung Phi Nguyen , Alireza Shahdoost Moghaddam
- Applicant Address: US CA Palo Alto; US CA Santa Clara; US CA San Jose
- Assignee: Steven W. Meeks,Hung Phi Nguyen,Alireza Shahdoost Moghaddam
- Current Assignee: Steven W. Meeks,Hung Phi Nguyen,Alireza Shahdoost Moghaddam
- Current Assignee Address: US CA Palo Alto; US CA Santa Clara; US CA San Jose
- Main IPC: G01N21/958
- IPC: G01N21/958 ; G01N21/84 ; G01N21/88 ; G02B26/10

Abstract:
An angle independent optical surface inspector capable of generating a light beam, directing the light beam to a sample, and de-scanning a reflected light beam that is reflected from the sample, thereby generating a first de-scanned light beam. The de-scanning is performed at approximately one focal length of a de-scanning lens from an irradiation location where the light beam irradiates the sample. The optical inspector also capable of focusing the first de-scanned light beam, thereby generating a focused light beam, and measuring the location of the focused light beam. The measuring of the location is performed at approximately one focal length of a focusing lens from the focusing lens. The incident angle of the light beam is within ten degrees of Brewster's angle. The focusing is performed by an achromatic lens.
Public/Granted literature
- US12130243B2 Angle independent optical surface inspector Public/Granted day:2024-10-29
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