Invention Application
- Patent Title: PERFORMING RADIO FREQUENCY MATCHING CONTROL USING A MODEL-BASED DIGITAL TWIN
-
Application No.: US17133787Application Date: 2020-12-24
-
Publication No.: US20220208520A1Publication Date: 2022-06-30
- Inventor: Tao Zhang , Upendra Ummethala
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03H7/40 ; H05H1/46

Abstract:
A method includes causing manufacturing equipment to generate a RF signal to energize a processing chamber associated with the manufacturing equipment. The method further includes receiving, from one or more sensors associated with the manufacturing equipment, current trace data associated with the RF signal. The method further includes updating impedance values of a digital replica associated with the manufacturing equipment based on the current trace data. The method further includes obtaining, from the digital replica, one or more outputs indicative of predictive data. The method further includes causing, based on the predictive data, performance of one or more corrective actions associated with the manufacturing equipment.
Public/Granted literature
- US11784028B2 Performing radio frequency matching control using a model-based digital twin Public/Granted day:2023-10-10
Information query