Invention Application
- Patent Title: Double Sided Oil Film Thrust Bearing in a Scroll Pump
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Application No.: US17607363Application Date: 2019-04-30
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Publication No.: US20220220852A1Publication Date: 2022-07-14
- Inventor: Ronald J. Forni
- Applicant: Agilent Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- International Application: PCT/US2019/030044 WO 20190430
- Main IPC: F01C21/02
- IPC: F01C21/02 ; F04C18/02 ; F04C29/02 ; F04C27/00

Abstract:
A vacuum scroll pump having an inlet portion having a pump inlet, and an exhaust portion having a pump outlet; a frame; a stationary scroll plate fixed to the frame and comprising a stationary plate comprising at least one stationary scroll blade; an orbiting scroll plate comprising an orbiting plate comprising at least one orbiting scroll blade projecting axially from a front side of the orbiting plate toward the stationary plate; a drive mechanism supported by the frame and operatively connected to the orbiting scroll plate so as to cause the orbiting scroll plate to orbit about a longitudinal axis of the vacuum scroll pump and thereby pump a process gas; a double-sided thrust bearing supporting the orbiting scroll plate; and a bellows which isolates the process gas from the drive mechanism.
Public/Granted literature
- US12098642B2 Double sided oil film thrust bearing in a scroll pump Public/Granted day:2024-09-24
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