OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD
Abstract:
An optical measurement device includes a light pulse source, a light separator unit, a wave synthesizer unit, an optical detection unit, and a measurement unit. The light pulse source outputs a plurality of light pulses having different temporal waveforms and different center wavelengths. The light separator unit spatially separates the light pulses and causes the light pulses to be incident on a measurement object. The wave synthesizer unit synthesizes the light pulses reflected by the measurement object or transmitted through the measurement object and emits the synthesized light pulses onto one optical path. The optical detection unit receives the light pulses emitted from the wave synthesizer unit and outputs a temporal waveform signal of the light pulses. The measurement unit measures timings when the light pulses each are received by the optical detection unit or a difference between the timings on a basis of the temporal waveform signal.
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