DEVICE FOR MEASURING PLASMA ION DENSITY AND APPARATUS FOR DIAGNOSING PLASMA USING THE SAME
Abstract:
Disclosed herein is a device for measuring a plasma ion density, which includes a transceiver antenna configured to apply and receive a microwave, of which a frequency is varied, to and from plasma, and a frequency analyzer configured to analyze a frequency of the microwave received from the transceiver antenna and measure a cut-off frequency, wherein the frequency of the microwave applied to the plasma is varied in the range of 100 kHz to 500 MHz.
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