Invention Application
- Patent Title: MEMS STRAIN GAUGE PRESSURE SENSOR WITH MECHANICAL SYMMETRIES
-
Application No.: US17216049Application Date: 2021-03-29
-
Publication No.: US20220307929A1Publication Date: 2022-09-29
- Inventor: Jun Zheng
- Applicant: Rosemount Aerospace Inc.
- Applicant Address: US MN Burnsville
- Assignee: Rosemount Aerospace Inc.
- Current Assignee: Rosemount Aerospace Inc.
- Current Assignee Address: US MN Burnsville
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A microelectromechanical system (MEMS) strain gauge pressure sensor includes a top wafer stack having a top surface and a first cavity that is configured to receive a first fluid at a first pressure, a backing wafer having a bottom surface opposite the top surface of the top wafer stack; a diaphragm wafer positioned between the top wafer stack and the backing wafer and having a second cavity that is configured to receive a second fluid at a second pressure, and a pedestal connected laterally to the top wafer stack, the backing wafer, and the diaphragm wafer. The diaphragm wafer includes a diaphragm extending between the first cavity and the second cavity, and a resistor positioned on the diaphragm. The MEMS strain gauge pressure sensor has a central axis such that the MEMS strain gauge pressure sensor has mechanical symmetries about the central axis.
Public/Granted literature
- US11879800B2 MEMS strain gauge pressure sensor with mechanical symmetries Public/Granted day:2024-01-23
Information query