Invention Publication
- Patent Title: ETCH UNIFORMITY IMPROVEMENT FOR SINGLE TURN INTERNAL COIL PVD CHAMBER
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Application No.: US17865144Application Date: 2022-07-14
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Publication No.: US20230141298A1Publication Date: 2023-05-11
- Inventor: Anthony Chih-Tung CHAN , Adolph Miller ALLEN , Mehul CHAUHAN
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/35

Abstract:
Methods and apparatus for generating a magnetic field external to a physical vapor deposition (PVD) chamber to improve etch or deposition uniformity on a substrate disposed inside of the PVD chamber are provided herein. In some embodiments, a process chamber, includes a chamber body defining an interior volume therein; a pedestal disposed in the interior volume for supporting a substrate; a coil disposed in the interior volume above the pedestal; and an external magnet assembly, comprising: a housing coupled to the chamber body; and a plurality of magnets disposed external to the chamber body coupled to the housing and arranged asymmetrically about the chamber body.
Public/Granted literature
- US12136544B2 Etch uniformity improvement for single turn internal coil PVD chamber Public/Granted day:2024-11-05
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