Invention Publication
- Patent Title: Platen Shield Cleaning System
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Application No.: US18091309Application Date: 2022-12-29
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Publication No.: US20230146929A1Publication Date: 2023-05-11
- Inventor: Shantanu Rajiv Gadgil , Sumit Subhash Patankar , Nathan Arron Davis , Allen L. D`Ambra
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- The original application number of the division: US16909947 2020.06.23
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B24B37/27 ; B08B3/00 ; B08B1/04 ; B24B37/34
Abstract:
In a chemical mechanical polishing system, a platen shield cleaning assembly is installed on a rotatable platen in a gap between the rotatable platen and a platen shield. The assembly includes a sponge holder attached to the platen and a sponge. The sponge is held by the sponge holder such that an outer surface of the sponge is pressed against an inner surface of the platen shield.
Public/Granted literature
- US11756804B2 Platen shield cleaning system Public/Granted day:2023-09-12
Information query
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