Invention Publication
- Patent Title: CROSSBAR MEMORY ARRAY IN FRONT END OF LINE
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Application No.: US17457926Application Date: 2021-12-07
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Publication No.: US20230180642A1Publication Date: 2023-06-08
- Inventor: Devendra K. Sadana , Ning Li , Bahman Hekmatshoartabari
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY ARMONK
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY ARMONK
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A structure including a bottom electrode, a phase change material layer, the phase change material layer includes a similar lattice constant as a lattice constant of the substrate, a top electrode on and vertically aligned with the phase change material layer, a dielectric material horizontally isolating the bottom electrode from the top electrode and the phase change material layer. A structure including a phase change material layer selected from amorphous silicon, amorphous germanium and amorphous silicon germanium, a top electrode on the phase change material layer, a bottom electrode, a dielectric material isolating the bottom electrode from the top electrode and the phase change material layer. Forming a bottom electrode, forming a phase change material layer adjacent to the bottom electrode, forming a top electrode above the phase change material, forming a dielectric material horizontally isolating the bottom electrode from the top electrode and the phase change material layer.
Public/Granted literature
- US11889774B2 Crossbar memory array in front end of line Public/Granted day:2024-01-30
Information query
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