Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE WITH AIR GAPS FOR REDUCING CURRENT LEAKAGE
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Application No.: US17546310Application Date: 2021-12-09
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Publication No.: US20230189500A1Publication Date: 2023-06-15
- Inventor: HAO-CHAN LO , HSING-HAN WU , JR-CHIUAN WANG , JEN-I LAI , CHUN-HENG WU
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW NEW TAIPEI CITY
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW NEW TAIPEI CITY
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
The present disclosure provides to a semiconductor memory device. The semiconductor memory device includes a substrate having a cell area and a peripheral area; and a first bit line structure disposed on and protruding from a surface of the cell area. The first bit line structure is sandwiched by a pair of air gaps and a barrier layer is conformally overlaying the air gaps adjacent to the sidewalls of the first bit line structure and the cell area. The first bit line structure has a sidewall and an ascending top portion, and a landing pad is disposed over the ascending top portion and the sidewalls of the first bit line structure. The landing pad has an inclined surface corresponding to the ascending top portion of the first bit line structure.
Public/Granted literature
- US11832437B2 Semiconductor memory device with air gaps for reducing current leakage Public/Granted day:2023-11-28
Information query
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