Invention Publication
- Patent Title: Method for Producing a Multipixel Detector
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Application No.: US18068775Application Date: 2022-12-20
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Publication No.: US20230197761A1Publication Date: 2023-06-22
- Inventor: Yunlong Li , Deniz Sabuncuoglu Tezcan , Pawel Malinowski , Gauri Karve
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP 216902.3 2021.12.22
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An example includes a method for producing a multipixel detector, the method including: providing a bottom layer including a first and a second bottom electrode, depositing an electrically insulating layer on the bottom layer, forming a first opening through the electrically insulating layer, depositing a first photon absorbing material in the first opening, forming a second opening through the electrically insulating layer, depositing a second photon absorbing material in the second opening, planarizing the deposited electrically insulating layer, the first photon absorbing material, and the second photon absorbing material to form a flat surface, and forming a common top electrode on top of the flat surface.
Information query
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