Invention Publication
- Patent Title: SEMICONDUCTOR DEVICE AND PREPARATION METHOD THEREFOR
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Application No.: US17925806Application Date: 2020-12-28
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Publication No.: US20230197773A1Publication Date: 2023-06-22
- Inventor: DONG FANG , KUI XIAO , ZHENG BIAN , JINJIE HU
- Applicant: CHINA RESOURCES MICROELECTRONICS (CHONGQING) CO., LTD.
- Applicant Address: CN CHONGQING
- Assignee: CHINA RESOURCES MICROELECTRONICS (CHONGQING) CO., LTD.
- Current Assignee: CHINA RESOURCES MICROELECTRONICS (CHONGQING) CO., LTD.
- Current Assignee Address: CN CHONGQING
- Priority: CN 2010418503.6 2020.05.18
- International Application: PCT/CN2020/140275 2020.12.28
- Date entered country: 2022-11-16
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/10 ; H01L29/40 ; H01L29/739 ; H01L29/78 ; H01L29/66

Abstract:
A semiconductor device comprises a drift region (100), a body region (110), a first doped region (111) and a second doped region (112)); a first trench penetrates the first doped region (111), the body region (110) extends into the drift region (100); an extension region (150) having an opposite conductivity type to the drift region (100) and surrounding the bottom wall of the first trench; where the first trench is filled with a first conductive structure (141) and a second conductive structure (142); a dielectric layer (130) formed between the second conductive structure (142) and the inner wall of the first trench, as well as between the first conductive structure (141) and the inner wall of the first trench; a second trench penetrating the first doped region (111) and the body region (110), and a dielectric layer (130) located between the third conductive structure (143) and the second trench (122).
Public/Granted literature
- US11862676B2 Semiconductor device and preparation method thereof Public/Granted day:2024-01-02
Information query
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