Invention Publication
- Patent Title: THERMALLY TUNABLE WAVEGUIDE AND PHOTONIC INTEGRATED CIRCUIT COMPONENT HAVING THE SAME
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Application No.: US17573623Application Date: 2022-01-11
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Publication No.: US20230221488A1Publication Date: 2023-07-13
- Inventor: Feng-Wei Kuo , Wen-Shiang Liao
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: G02B6/12
- IPC: G02B6/12
Abstract:
A thermally tunable waveguide including an optical waveguide and a heater is provided. The optical waveguide includes a phase shifter. The heater is disposed over the optical waveguide. The heater includes a heating portion, pad portions and tapered portions. The heating portion overlaps with the phase shifter of the optical waveguide. The pad portions are disposed aside of the heating portion. Each of the pad portions is connected to the heating portion through one of the tapered portions respectively.
Public/Granted literature
- US11953723B2 Thermally tunable waveguide and photonic integrated circuit component having the same Public/Granted day:2024-04-09
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