Invention Publication
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICES HAVING THROUGH STAIR CONTACTS AND METHODS FOR FORMING THE SAME
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Application No.: US18374507Application Date: 2023-09-28
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Publication No.: US20240023333A1Publication Date: 2024-01-18
- Inventor: Qinxiang Wei , Jianhua Sun , Ji Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/768 ; H01L23/522 ; H01L21/28 ; H10B43/35 ; H10B43/40

Abstract:
In an example, a three-dimensional (3D) memory device includes a memory stack and a through stair contact (TSC). The memory stack includes interleaved conductive layers and dielectric layers. The memory stack includes stairs in a staircase region. The TSC extends through the memory stack in the staircase region. The TSC includes a first conductor layer and a first spacer circumscribing the first conductor layer. The first conductor layer of the TSC is insulated from the conductive layers of the memory stack by the first spacer.
Public/Granted literature
- US12035530B2 Three-dimensional memory devices having through stair contacts and methods for forming the same Public/Granted day:2024-07-09
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