Invention Publication
- Patent Title: PHASE CHANGE RANDOM ACCESS MEMORY DEVICE
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Application No.: US18231750Application Date: 2023-08-08
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Publication No.: US20240040939A1Publication Date: 2024-02-01
- Inventor: Chun-Hsu Yen , Yu-Chuan Hsu , Chen-Hui Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu City
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu City
- The original application number of the division: US15904064 2018.02.23
- Main IPC: H10N70/00
- IPC: H10N70/00 ; H10B63/00 ; H10N70/20

Abstract:
A method for making a memory device, includes: forming a first dielectric layer over a bottom electrode; forming a first void extending through the first dielectric layer to expose a portion of an upper boundary of the bottom electrode; forming a first conductive structure lining along respective sidewalls of the first void and the exposed portion of the upper boundary of the bottom electrode; filling the first void with the first dielectric layer; and forming a phase change material layer over the first dielectric layer to cause the phase change material layer to contact at least a portion of a sidewall of the first conductive structure.
Public/Granted literature
- US12089513B2 Phase change random access memory device Public/Granted day:2024-09-10
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