Invention Publication
- Patent Title: APPARATUS FOR MANUFACTURING MASK ASSEMBLY, METHOD FOR CALCULATING AUTO-TEACHING DATA USING THE SAME, AND METHOD FOR MANUFACTURING MASK ASSEMBLY USING AUTO-TEACHING DATA
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Application No.: US18347799Application Date: 2023-07-06
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Publication No.: US20240102146A1Publication Date: 2024-03-28
- Inventor: JEONG-SU KIM , JEYUN RYU
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20220120137 2022.09.22
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/24

Abstract:
Provided are an apparatus for manufacturing a mask assembly, a method for calculating auto-teaching data using the same, and a method of manufacturing a mask assembly using position correction values calculated by auto-teaching data calculation. The apparatus for manufacturing a mask assembly includes a processing unit including a stage, a mask, a mask frame, and marking parts, a first gantry disposed on the processing unit and movable in a first direction, a second gantry connected to the first gantry and movable in a second direction intersecting the first direction, a photographing unit connected to the second gantry and that photographs the marking parts, and a movement control unit that controls movements of the first gantry and the second gantry.
Information query
IPC分类: