Invention Publication
- Patent Title: Inattentive HF Concentration Vapors Phase Release of Micro-electro-mechanical Systems and Optical Systems
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Application No.: US18496823Application Date: 2023-10-27
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Publication No.: US20240140786A1Publication Date: 2024-05-02
- Inventor: Tito Busani , Ravi Kiran Chityala
- Applicant: UNM Rainforest Innovations
- Applicant Address: US NM Albuquerque
- Assignee: UNM Rainforest Innovations
- Current Assignee: UNM Rainforest Innovations
- Current Assignee Address: US NM Albuquerque
- Main IPC: B81C99/00
- IPC: B81C99/00
Abstract:
A low-cost, conventional release using low concentrations of HF to overcome the stiction of MEMS structure.
Information query
