Invention Publication
- Patent Title: POWER POLISHING APPARATUSES AND METHODS FOR IN-SITU FINISHING AND COATING OF OPTICAL COMPONENT
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Application No.: US18429750Application Date: 2024-02-01
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Publication No.: US20240167150A1Publication Date: 2024-05-23
- Inventor: Joel Bagwell , Nathan Carlie
- Applicant: Edmund Optics, Inc.
- Applicant Address: US NJ Barrington
- Assignee: Edmund Optics, Inc.
- Current Assignee: Edmund Optics, Inc.
- Current Assignee Address: US NJ Barrington
- Main IPC: C23C16/02
- IPC: C23C16/02 ; B24B13/00 ; C23C14/02 ; C23C14/30 ; C23C14/58 ; C23C16/448 ; H01J37/06 ; H01S3/094 ; C23C14/34
Abstract:
A finishing and coating apparatus combines finishing and coating optical components into one vacuum apparatus. The apparatus includes a vacuum system, a substrate holder, a finisher including a laser engine and a beam delivery apparatus, and a coating source. The finisher is configured to finish the optical components prior to coating the optical components. The finisher includes a laser engine and a laser beam delivery apparatus configured to direct a beam from the laser engine toward each of the optical components.
Information query
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