Invention Publication
- Patent Title: THIN-FILM FORMING RAW MATERIAL, WHICH IS USED IN ATOMIC LAYER DEPOSITION METHOD, THIN-FILM, METHOD OF PRODUCING THIN-FILM, AND ZINC COMPOUND
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Application No.: US18280559Application Date: 2022-02-24
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Publication No.: US20240167154A1Publication Date: 2024-05-23
- Inventor: Atsushi SAKURAI , Yoshiki OOE , Keisuke TAKEDA , Chiaki MITSUI , Atsushi YAMASHITA
- Applicant: ADEKA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADEKA CORPORATION
- Current Assignee: ADEKA CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 21036008 2021.03.08
- International Application: PCT/JP2022/007559 2022.02.24
- Date entered country: 2023-09-06
- Main IPC: C23C16/455
- IPC: C23C16/455

Abstract:
Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including a compound represented by the following general formula (1):
M(R1)x1[A1-N(R2)(R3)]y1 (1)
in the formula (1), R1, R2, and R3 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms, A1 represents a linear or branched alkylene group having 1 to 5 carbon atoms, x1 represents an integer of from 0 to 2, y1 represents an integer of from 1 to 3, and M represents an indium atom or a zinc atom, provided that when M represents an indium atom, a compound in which x1 represents 2, y1 represents 1, and R1, R2, and R3 each represent a methyl group is excluded.
M(R1)x1[A1-N(R2)(R3)]y1 (1)
in the formula (1), R1, R2, and R3 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms, A1 represents a linear or branched alkylene group having 1 to 5 carbon atoms, x1 represents an integer of from 0 to 2, y1 represents an integer of from 1 to 3, and M represents an indium atom or a zinc atom, provided that when M represents an indium atom, a compound in which x1 represents 2, y1 represents 1, and R1, R2, and R3 each represent a methyl group is excluded.
Information query
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