Invention Publication
- Patent Title: TIN COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, METHOD FOR PRODUCING THIN-FILM, AND HALOGEN COMPOUND
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Application No.: US18282130Application Date: 2022-03-09
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Publication No.: US20240167155A1Publication Date: 2024-05-23
- Inventor: Tomoharu YOSHINO , Atsushi YAMASHITA , Yoshiki OOE
- Applicant: ADEKA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADEKA CORPORATION
- Current Assignee: ADEKA CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 21044375 2021.03.18
- International Application: PCT/JP2022/010299 2022.03.09
- Date entered country: 2023-09-14
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C07F7/22 ; C23C16/40 ; C23C16/448
Abstract:
Provided is a tin compound, which is represented by the following general formula (1):
in the formula (1), R1 and R2 each independently represent an alkyl group having 1 to 5 carbon atoms or an alkylsilyl group having 3 to 12 carbon atoms, R3 and R4 each independently represent an alkyl group having 1 to 5 carbon atoms, and R5 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms.
in the formula (1), R1 and R2 each independently represent an alkyl group having 1 to 5 carbon atoms or an alkylsilyl group having 3 to 12 carbon atoms, R3 and R4 each independently represent an alkyl group having 1 to 5 carbon atoms, and R5 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms.
Information query
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