Invention Publication
- Patent Title: POSITIONING DEVICE
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Application No.: US18508306Application Date: 2023-11-14
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Publication No.: US20240168393A1Publication Date: 2024-05-23
- Inventor: Arjan Bakker , Bart van Campen
- Applicant: DR. JOHANNES HEIDENHAIN GmbH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GmbH
- Current Assignee: DR. JOHANNES HEIDENHAIN GmbH
- Current Assignee Address: DE Traunreut
- Priority: EP 208218.2 2022.11.18
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G01N21/95

Abstract:
A positioning device for positioning a stage relative to a tool mounted on a carrier device includes two intersecting linear axes disposed one above the other for pre-positioning the stage. A first magnetic levitation unit is configured to support the stage on one of the linear axes, the stage being actively movable for fine positioning in six degrees of freedom. A measuring head and first and second 6-DOF encoders are configured to determine a position of the stage relative to the carrier device. The measuring head is mounted on the other linear axis. The first 6-DOF encoder is disposed between the carrier device and the measuring head and the second 6-DOF encoder is disposed between the measuring head and the stage. A second magnetic levitation unit disposed on the other linear axis is configured to actively move the measuring head in the six degrees of freedom.
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