Invention Grant
- Patent Title: Process for electropolishing semiconductor surfaces
- Patent Title (中): 电解抛光半导体表面的工艺
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Application No.: US2202760Application Date: 1960-04-13
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Publication No.: US3073764APublication Date: 1963-01-15
- Inventor: SULLIVAN MILES V
- Applicant: BELL TELEPHONE LABOR INC
- Assignee: Nokia Bell Labs
- Current Assignee: Nokia Bell Labs
- Priority: US2202760 1960-04-13
- Main IPC: C25F3/30
- IPC: C25F3/30 ; C25F7/00 ; H01L21/306
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