Invention Grant
- Patent Title: Selective chemical deposition of thin-film interconnections and contacts
- Patent Title (中): 薄膜互连和联系的选择性化学沉积
-
Application No.: US3485665DApplication Date: 1967-08-22
-
Publication No.: US3485665APublication Date: 1969-12-23
- Inventor: ANGELO MICHAEL ANTHONY DE , SAGAL MATTHEW WARREN , SHARP DONALD JEX
- Applicant: WESTERN ELECTRIC CO
- Assignee: Lucent Technologies Inc
- Current Assignee: Lucent Technologies Inc
- Priority: US66246167 1967-08-22
- Main IPC: C23C18/16
- IPC: C23C18/16 ; C23C18/30 ; C25D5/02 ; H01L49/02 ; H05K3/24 ; B44D1/18 ; C23B5/50
Information query
IPC分类:
