Invention Grant
- Patent Title: Preventing speed loss in oxygen sensitive photo-resist layers
- Patent Title (中): 防止氧气感光层损失速度
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Application No.: US3669667DApplication Date: 1970-12-21
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Publication No.: US3669667APublication Date: 1972-06-13
- Inventor: SKARVINKO EUGENE R
- Applicant: IBM
- Assignee: Ibm
- Current Assignee: Ibm
- Priority: US10043770 1970-12-21
- Main IPC: G03F7/09
- IPC: G03F7/09 ; G03C1/46
Abstract:
A METHOD FOR PREVENTING LOSS OF PHOTOGRAPHIC SPEED OF AN OXYGEN SENSITIVE PHOTORESIST BY PROVIDING A LAYER OF INERT GAS PRODUCING MATERIAL OVER THE STANDARD PHOTORESIST. THE GAS PRODUCING MATERIAL LIBERATES GAS DURING THE EXPOSURE STEP THUS PROTECTING THE RESIST.
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