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US4810883A Device for providing an energy filtered charge particle image 失效
用于提供能量过滤的电荷粒子图像的装置

  • Patent Title: Device for providing an energy filtered charge particle image
  • Patent Title (中): 用于提供能量过滤的电荷粒子图像的装置
  • Application No.: US6712
    Application Date: 1987-01-29
  • Publication No.: US4810883A
    Publication Date: 1989-03-07
  • Inventor: David W. Turner
  • Applicant: David W. Turner
  • Assignee: Turner David W
  • Current Assignee: Turner David W
  • Priority: GBX8513821 19850531; GBX8530011 19851205
  • Main IPC: H01J37/05
  • IPC: H01J37/05 H01J49/46
Device for providing an energy filtered charge particle image
Abstract:
A device for providing an energy filtered charged particle image particularly an electron image in the form of an electron energy analyzer which acts as a band-pass filter whilst maintaining the spatial integrity of the electron image in a uniform magnetic field. It embodies new electron optical properties wherein image electrons injected parallel to the magnetic field are guided, using crossed electrostatic and magnetic fields, to a low-pass electron mirror and then through a high-pass retardation filter. Non-uniform electrostatic deflection fields are used to compensate for the energy-dependent dispersion of the crossed fields whereby it is possible to correct for image distortion resulting from such dispersion.
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