Invention Grant
- Patent Title: Phase-stepping interferometry
- Patent Title (中): 相位干涉测量
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Application No.: US469480Application Date: 1990-04-11
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Publication No.: US5048964APublication Date: 1991-09-17
- Inventor: John R. Tyrer , Fernando Mendoza-Santoyo , David Kerr
- Applicant: John R. Tyrer , Fernando Mendoza-Santoyo , David Kerr
- Applicant Address: GB2 London
- Assignee: National Research Development Corporation
- Current Assignee: National Research Development Corporation
- Current Assignee Address: GB2 London
- Priority: GBX8820761 19880902
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B9/021 ; G01J9/02
Abstract:
An interferometric procedure, such as electronic speckle pattern interferometry, involves generating two signals representing the point-by-point variations in intensity of respective patterns of electromagnetic radiation resulting from the interference of first and second beams of such radiation derived from a coherent source, with at least the first beam from each pattern being scattered, before interference with its respective second beam, from a common object surface, and with a corresponding pair of the beams, one for each pattern, having a predetermined relative phase difference of other than a multiple of .pi.; and determining from the two signals values for a datum phase of the radiation at the object surface. Preferably, as a preliminary to this last determination. DC components are removed from the two signals. Conveniently, to simplify the determination, the phase difference is an odd multiple of .pi./4 or .pi./2.
Public/Granted literature
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