Invention Grant
- Patent Title: Integrated fluid dispense apparatus to reduce contamination
- Patent Title (中): 综合流体排放装置减少污染
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Application No.: US705197Application Date: 1991-05-24
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Publication No.: US5195655APublication Date: 1993-03-23
- Inventor: Yefim Bukhman
- Applicant: Yefim Bukhman
- Applicant Address: IL Schaumburg
- Assignee: Motorola, Inc.
- Current Assignee: Motorola, Inc.
- Current Assignee Address: IL Schaumburg
- Main IPC: F17D1/08
- IPC: F17D1/08 ; B01J4/00 ; B01J4/02 ; B01J19/18 ; G03F7/16 ; H01L21/027
Abstract:
An integrated fluid dispense apparatus (10) suitable for delivering ultrapure fluids. The fluid is confined to a nonrigid hermetic fluid delivery apparatus (10). A pumping mechanism (11) pumps fluids in precise volumes and flow rates. A moisturizing dispense nozzle (12) provides a saturated vapor atmosphere at the nozzle tip to prevent the fluid from drying during non-dispense periods.
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