Invention Grant
- Patent Title: Optical system for rapid inspection of via location
- Patent Title (中): 光学系统用于快速检查通孔位置
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Application No.: US985390Application Date: 1992-12-04
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Publication No.: US5288991APublication Date: 1994-02-22
- Inventor: Mark R. King , William H. Vonderhaar
- Applicant: Mark R. King , William H. Vonderhaar
- Applicant Address: NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: NY Armonk
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01N21/88 ; G02B6/42 ; G02B6/04 ; G02B27/00
Abstract:
An inspection system in which the surface of a substrate is continuously scanned by a linear CCD. The surface is illuminated in a narrowly focused strip from a broad-band light source that is selectively wavelength filtered to optimize image contrast to the optical characteristics of the surface under inspection. A channel integrator in the light source optical system provides illumination homogeneity at the surface of the substrate.
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