Invention Grant
- Patent Title: Sputtering cathode with uniformity compensation
- Patent Title (中): 溅射阴极均匀补偿
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Application No.: US734207Application Date: 1996-10-21
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Publication No.: US5783048APublication Date: 1998-07-21
- Inventor: Steven Hurwitt
- Applicant: Steven Hurwitt
- Applicant Address: JPX Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JPX Tokyo
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/35 ; C23F4/00 ; H01J37/34
Abstract:
A sputtering apparatus for forming a thin film on a substrate is disclosed. The sputtering apparatus includes a target for providing target material for forming the thin film, wherein the target includes a first area. The sputtering apparatus further includes a plasma discharge to enable removal of target material from the target. In addition, a main magnet is provided for generating a main magnetic field for controlling the plasma discharge to remove the target material. Further, a compensating magnet is utilized which is positioned adjacent to the first area. The compensating magnet generates a compensating magnetic field which interacts with the main magnetic field to control the plasma discharge in the first area to form a desired erosion pattern in the first area and enable formation of a substantially uniform film thickness on the substrate.
Public/Granted literature
- US5199694A Paper sheet feeder Public/Granted day:1993-04-06
Information query
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