Invention Grant
- Patent Title: Method for manufacturing an electronic structure
- Patent Title (中): 电子结构的制造方法
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Application No.: US835514Application Date: 1997-04-08
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Publication No.: US5946600APublication Date: 1999-08-31
- Inventor: Dror Hurwitz , Eva Igner , Boris Yofis , Dror Katz
- Applicant: Dror Hurwitz , Eva Igner , Boris Yofis , Dror Katz
- Applicant Address: ILX Migdal Haemek
- Assignee: P.C.B. Ltd.
- Current Assignee: P.C.B. Ltd.
- Current Assignee Address: ILX Migdal Haemek
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/768 ; H01L23/532 ; H01L23/538 ; H05K3/46 ; H01L21/44
Abstract:
A process for manufacturing an electronic interconnect structure, the process including the steps of depositing an adhesion metal layer over a dielectric material surface having at least one exposed aluminum surface; depositing a barrier metal layer over the adhesion metal layer; depositing a first layer of aluminum over the barrier metal layer; depositing an intermediate barrier metal layer over the first layer of aluminum; applying a photoresist layer on top of the intermediate barrier metal layer; exposing and developing the photoresist layer; removing the exposed barrier metal and photoresist layer, leaving a layer of barrier metal over the aluminum layer; converting those portions of the layer of aluminum which are not covered by barrier metal to a porous aluminum oxide by porous anodization; removing the porous aluminum oxide; and removing the exposed barrier metal and adhesion metal layers to leave exposed patterned aluminum, and an electronic interconnect structure manufactured by this method.
Information query
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