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US5969249A Resonant accelerometer with flexural lever leverage system 失效
具有弯曲杠杆系统的谐振加速度计

Resonant accelerometer with flexural lever leverage system
Abstract:
An accelerometer comprises a proof mass, a first resonant tuning fork connected to the proof mass, a second resonant tuning fork connected to the proof mass, and a flexural lever leverage system supporting the proof mass above a substrate. The flexural lever leverage system enhances an acceleration force applied to the proof mass to cause a tensile force in the first resonant tuning fork which raises its resonant frequency, and a compressive force in the second resonant tuning fork which lowers its resonant frequency. The device may be fabricated using semiconductor-based surface-micromachining technology.
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