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US6095667A Illuminating optical system for use in projecting exposure device 失效
用于投影曝光装置的照明光学系统

Illuminating optical system for use in projecting exposure device
Abstract:
An illuminating optical system for use in a projection exposure device with high utilization efficiency of the light from the light source and capable of easily realizing with simple construction is disclosed. The system comprises a light source, a light flux separating optical system for separating a light flux from the light source, a condenser optical system for leading the light flux separated by the light flux separating optical system on a reticle, and a diffraction optical unit included in the light flux separating optical system and having a linear grating pattern for separating the light flux from the light source into four.
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